名词
中文翻译：阴极溅射
同义词：
['electron beam sputtering', 'cathode ion sputtering']
例句：
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1.The process of cathode sputtering is crucial for the fabrication of micro-electronic devices.
阴极溅射过程对于微电子器件的制造至关重要。
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2. In this study, we investigated the effect of cathode sputtering on the surface roughness of alumina ceramics.
在本研究中，我们研究了阴极溅射对氧化铝陶瓷表面粗糙度的影响。
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3. The cathode sputtering technique has been widely used in the field of material science and engineering.
阴极溅射技术在材料科学和工程领域得到了广泛应用。