cathodic sputtering

例句：

1. 1. The process of cathodic sputtering is crucial for the formation of thin films.
   阴极溅射过程对于形成薄膜至关重要。
2. 2. During cathodic sputtering, a high voltage is applied to the substrate to remove contaminants.
   在阴极溅射过程中，施加高电压以去除污染物。
3. 3.The cathodic sputtering technique has been widely used in microelectronics manufacturing.
   阴极溅射技术在微电子制造中得到了广泛应用。