名词
中文翻译：电子束光刻技术
同义词：
['electron beam lithography', 'electron beam lithography technique']
例句：
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1.This new technology allows for faster and more precise lithography.
这项新技术允许更快、更精确的蚀刻。
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2.The lithography process is crucial in the manufacturing of microchips.
蚀刻过程在微芯片制造中至关重要。
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3. The development of this lithography technique has greatly improved the efficiency of semiconductor production.
这种光刻技术的发展大大提高了半导体生产的效率。