electron-beam lithography

例句：

1. 1.The development of electron-beam lithography has greatly improved the efficiency of micro-machining.
   电子束光刻技术的发展大大提高了微加工的效率。
2. 2.In the field of electronics, electron-beam lithography is widely used for manufacturing semiconductor devices.
   在电子领域，电子束光刻技术被广泛用于制造半导体器件。
3. 3. Due to its high resolution and precise control, electron-beam lithography is considered a key technology in the fabrication of integrated circuits.
   由于其高分辨率和精确控制，电子束光刻被认为是集成电路制造的关键技术。