electron-beam pumping

例句：

1. 1.The electron beam pumping system is crucial for the operation of the ion source.
   电子束泵送系统对于离子源的运行至关重要。
2. 2. In this process, the electron beam pumping is used to remove impurities from the material.
   在这个过程中，使用电子束泵送来去除材料中的杂质。
3. 3. The electron beam pumping technology has greatly improved the efficiency of the plasma etching process.
   电子束泵送技术大大提高了等离子体刻蚀过程的效率。