epitaxial furnace

例句：

1. 1. The epitaxial furnace is used to grow crystals with specific orientations.
   外延炉用于生长具有特定取向的晶体。
2. 2. In the epitaxial furnace, the material is heated and cooled at a controlled rate.
   在外延炉中，材料以受控速率加热和冷却。
3. 3. The epitaxial furnace is an essential tool for the growth of high-quality semiconductor materials.
   外延炉是生产高质量半导体材料的关键工具。