名词短语
中文翻译：气体放电蚀刻
同义词：
['gas discharge etching', 'gas discharge etching process']
例句：
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1. The gas-discharge etching process is crucial for the manufacturing of microelectronic devices.
气体放电蚀刻工艺对于微电子器件的制造至关重要。
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2. The gas-discharge etching process has been widely used in the fabrication of integrated circuits.
气体放电蚀刻工艺在集成电路的制造中得到了广泛应用。
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3. The gas-discharge etching process is a complex and delicate process that requires precise control over the parameters.
气体放电蚀刻过程是一个复杂而精细的过程，需要精确控制参数。