名词
中文翻译：离子轰击
同义词：
['ion sputtering', 'ion etching']
例句：
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1.During the plasma-assisted chemical vapor deposition process, ions bombard the surface of the substrate.
在等离子辅助化学气相沉积过程中，离子轰击衬底表面。
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2. The ion bombardment technique is used to remove impurities from semiconductor wafers.
离子轰击技术用于从半导体晶片上去除杂质。
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3. Ion bombardment has been shown to improve the quality of metal films by increasing their crystallinity.
研究表明，离子轰击可以提高金属薄膜的结晶度，从而提高其质量。