名词
中文翻译：低压微波等离子体
同义词：
['low-pressure microwave plasma', 'low-pressure microwave plasma discharge', 'low-pressure microwave plasma source']
例句：
-
1. The low-pressure microwave plasma is used to clean the surface of the glass.
低压微波等离子体用于清洁玻璃的表面。
-
2. The low-pressure microwave plasma source is a key component in the plasma etching process.
低压微波等离子体源是等离子体刻蚀工艺的关键部件。
-
3. The low-pressure microwave plasma source has been widely used in various industrial applications.
低压微波等离子体源在各种工业应用中得到了广泛应用。