名词
中文翻译：微细蚀刻术
同义词：
['micro-engraving', 'micro-machining例句：1. The process of microlithography is crucial for the production of high-quality microelectronic devices.（微细蚀刻过程对于生产高质量电子器件至关重要。）2. In microlithography', 'a photoresist layer is used to create a precise pattern on a substrate.（在微细蚀刻术中，使用光阻层在基板上创建精确图案。）']
例句：
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1. The process of microlithography is crucial for the production of high-quality microelectronic devices.
微细蚀刻过程对于生产高质量电子器件至关重要。
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2. In microlithography, a photoresist layer is used to create a precise pattern on a substrate.
在微细蚀刻术中，使用光阻层在基板上创建精确图案。
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3.Researchers have developed new techniques for microlithography that can improve resolution and reduce costs.
研究人员已经开发出新的微细蚀刻技术，可以提高分辨率并降低成本。