名词
中文翻译：微波干涉测量术
同义词：
['microwave interferometry', 'microwave metrology']
例句：
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1. The technique of microwave interferometry is used to measure the distance between two objects.
微波干涉测量术技术用于测量两个物体之间的距离。
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2. In microelectronics, microwave interferometry is used to detect defects in semiconductor wafers.
在微电子学中，微波干涉测量术用于检测半导体晶片中的缺陷。
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3. The accuracy of microwave interferometry depends on the stability of the microwave source and the quality of the interference pattern.
微波干涉测量术的准确性取决于微波源的稳定性和干涉图案的质量。