monochlorosilane

例句：

1. 1. This compound is used in the production of semiconductors.
   这种化合物用于半导体的生产。
2. 2. The monochlorosilane was found to have a unique property that made it useful for industrial applications.
   发现这种一氯硅烷具有独特的性质，使其在工业应用中非常有用。
3. 3. The researchers are studying the reaction of monochlorosilane with water to understand its propertiesbetter.
   研究人员正在研究一氯硅烷与水的反应，以更好地了解其特性。