名词
中文翻译：单硅烷
同义词：
['monosilane', 'monosilane']
例句：
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1.The monosilane was used as a precursor in the synthesis of silicon-based materials.
单硅烷被用作合成基于硅的材料的前驱体。
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2. The monosilane was found to have excellent thermal stability and chemical resistance.
单硅烷被发现具有极好的热稳定性和化学抵抗性。
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3. The monosilane was used as a solvent for the preparation of high-performance silicon-based composites.
单硅烷被用作制备高性能硅基复合材料的溶剂。