名词短语
中文翻译：等离子体源离子注入
同义词：
['plasma source ion implantation', 'plasma source ion implantation process']
例句：
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1.The plasma source ion implantation process is crucial for the quality of semiconductor wafers.
等离子体源离子注入过程对于半导体晶片的质量至关重要。
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2.The plasma source ion implantation process has been widely used in the manufacturing of integrated circuits.
等离子体源离子注入工艺在集成电路制造中得到了广泛应用。
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3.The plasma source ion implantation process is a key technology for producing high-performance microelectronic devices.
等离子体源离子注入工艺是生产高性能微电子器件的关键技术。