名词
中文翻译：活性溅射
同义词：
['reactive ion sputtering', 'reactive ion etching']
例句：
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1. The process of reactive sputtering is crucial for the formation of thin films.
活性溅射过程对于薄膜的形成至关重要。
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2.In reactive sputtering, a high-energy beam of ions bombards the surface of a substrate, causing it to be etched away.
在活性溅射过程中，一束高能离子束轰击基片表面，使其被蚀刻掉。
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3. The reactive sputtering technique has been widely used in the manufacturing of semiconductor devices.
活性溅射技术已被广泛应用于半导体器件的制造中。